A piezoelectric-driven microgripper with three-stage amplification was designed, which is able to perceive the NATTOKINASE tip displacement and gripping force.The key structure parameters of the microgripper were determined by finite element optimization and its theoretical amplification ratio was derived.The tracking experiments of the tip displacement and gripping force were conducted with a PID controller.It is shown that the standard deviation of tracking error of the tip displacement is less than 0.
2 μm and the gripping force is 0.35 mN under a closed-loop control.It would provide some references for realizing high-precision microassembly Refrigerant Gas Leak Detector tasks with the designed microgripper which can control the displacement and gripping force accurately.